Wafer oxidation heating element

Mon, 06 Jul 2026 03:56:46 +0800

Introduction

Let’s cut to the chase. In semiconductor wafer oxidation, the heating element isn’t just some part on a list. It’s the heart of the furnace. So we set out to build our own halogen heating lamps right here at home, because the industry needed something that could handle extreme temperatures without blinking. The whole point? Keeping the temperature perfectly even across the wafer—within a razor-thin margin of ±0.1°C. How’d we pull it off? By pairing high-voltage operation with a compact build and rock-solid materials. The result is a drop-in replacement that performs just as well as the imported stuff, but costs you less in the long run.

Oxidation on Pure Quartz Infrared Heaters

Wafer oxidation heating element

Introduction