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		<title>Nitride on Pure Quartz Infrared Heaters</title>
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				<title>Gallium nitride (GaN) MOCVD heater</title>
				<link>http://pure-quartz-ir-heater.com/en/posts/gallium-nitride-gan-mocvd-heater/</link>
				<pubDate>Thu, 18 Jun 2026 01:09:37 +0800</pubDate>
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				<description>&lt;p&gt;&lt;img src=&#34;http://pure-quartz-ir-heater.com/images/a071a4619f1d04d8f3e2839bd3740f1c.png&#34; alt=&#34;Gallium nitride (GaN) MOCVD heater&#34;&gt;&lt;/p&gt;&#xA;&lt;p&gt;On the wafer floor, a few degrees of temperature drift during GaN epitaxy doesn&amp;rsquo;t just nudge yield—it wipes it out. You lose thickness control, you lose sheet resistance consistency, and the edge devices your customers are paying for simply don&amp;rsquo;t perform.&lt;/p&gt;&#xA;&lt;h2 id=&#34;what-matters-technically&#34;&gt;What matters, technically&lt;/h2&gt;&#xA;&lt;p&gt;We run a GaN MOCVD infrared heater that keeps sub-millimeter uniformity by pairing a tightly controlled short-wave IR source with a quartz-based thermal stack. The payoff is a repeatable thermal field across the wafer, held within ±0.1°C at the wafer level. This isn&amp;rsquo;t a lab number—it&amp;rsquo;s the same thermal profile, run after run, chamber after chamber.&#xA;The &lt;a href=&#34;https://henruite.com&#34;&gt;platform&lt;/a&gt; is built for cleanroom reality: zero particle generation in steady-state operation, and stable &lt;a href=&#34;https://o-yate.com&#34;&gt;output&lt;/a&gt; across Class 1–100 environments.&lt;/p&gt;</description>
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